MEMS and NEMS

Author: Sergey Edward Lyshevski
Publisher: CRC Press
ISBN: 9781420040517
Release Date: 2002-01-18
Genre: Technology & Engineering

The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including transducers, switches, logic gates, actuators and sensors. MEMS and NEMS: Systems, Devices, and Structures is designed to help you meet those challenges and solve fundamental, experimental, and applied problems. Written from a multi-disciplinary perspective, this book forms the basis for the synthesis, modeling, analysis, simulation, control, prototyping, and fabrication of MEMS and NEMS. The author brings together the various paradigms, methods, and technologies associated with MEMS and NEMS to show how to synthesize, analyze, design, and fabricate them. Focusing on the basics, he illustrates the development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization. The applications of MEMS and NEMS in areas such as biotechnology, medicine, avionics, transportation, and defense are virtually limitless. This book helps prepare you to take advantage of their inherent opportunities and effectively solve problems related to their configurations, systems integration, and control.

Mems Nems

Author: Cornelius T. Leondes
Publisher: Springer Science & Business Media
ISBN: 9780387257860
Release Date: 2007-10-08
Genre: Technology & Engineering

This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.

Adhesion Aspects in MEMS NEMS

Author: Seong H. Kim
Publisher: CRC Press
ISBN: 9789004190948
Release Date: 2011-02-18
Genre: Science

Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects owing to their small size and limited actuation force that can be generated. Extension of MEMS technology concepts to the nanoscale and development of NanoElectroMechanicalSystems(NEMS) will result in systems even more strongly influenced by surface forces. The book is divided into five parts as follows: Part 1: Understanding Through Continuum Theory; Part 2: Computer Simulation of Interfaces; Part 3: Adhesion and Friction Measurements; Part 4: Adhesion in Practical Applications; and Part 5: Adhesion Mitigation Strategies. This compilation constitutes the first book on this extremely important topic in the burgeoning field of MEMS/NEMS. It is obvious from the topics covered in this book that bountiful information is contained here covering understanding of surface forces and adhesion as well as novel ways to mitigate adhesion in MEMS/NEMS. This book should be of great interest to anyone engaged in the wonderful and fascinating field of MEMS/NEMS, as it captures the current R&D activity.

Vibrations of Elastic Systems

Author: Edward B. Magrab
Publisher: Springer Science & Business Media
ISBN: 9789400726727
Release Date: 2012-01-12
Genre: Technology & Engineering

This work presents a unified approach to the vibrations of elastic systems as applied to MEMS devices, mechanical components, and civil structures. Applications include atomic force microscopes, energy harvesters, and carbon nanotubes and consider such complicating effects as squeeze film damping, viscous fluid loading, in-plane forces, and proof mass interactions with their elastic supports. These effects are analyzed as single degree-of-freedom models and as more realistic elastic structures. The governing equations and boundary conditions for beams, plates, and shells with interior and boundary attachments are derived by applying variational calculus to an expression describing the energy of the system. The advantages of this approach regarding the generation of orthogonal functions and the Rayleigh-Ritz method are demonstrated. A large number of graphs and tables are given to show the impact of various factors on the systems’ natural frequencies, mode shapes, and responses.

Materials and Failures in MEMS and NEMS

Author: Atul Tiwari
Publisher: John Wiley & Sons
ISBN: 9781119083863
Release Date: 2015-09-11
Genre: Technology & Engineering

The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process. Although, an enormous amount of work being accomplished in the area, most of the information is treated as confidential or privileged. It is extremely hard to find the meaningful information for the new or related developments. This book is collection of chapters written by experts in MEMS and NEMS technology. Chapters are contributed on the development of new MEMS and NEMS materials as well as on the properties of these devices. Important properties such as residual stresses and buckling behavior in the devices are discussed as separate chapters. Various models have been included in the chapters that studies the mode and mechanism of failure of the MEMS and NEMS. This book is meant for the graduate students, research scholars and engineers who are involved in the research and developments of advanced MEMS and NEMS for a wide variety of applications. Critical information has been included for the readers that will help them in gaining precise control over dimensional stability, quality, reliability, productivity and maintenance in MEMS and NEMS. No such book is available in the market that addresses the developments and failures in these advanced devices.

Modeling MEMS and NEMS

Author: John A. Pelesko
Publisher: CRC Press
ISBN: 9781420035292
Release Date: 2002-11-25
Genre: Technology & Engineering

Designing small structures necessitates an a priori understanding of various device behaviors. The way to gain such understanding is to construct, analyze, and interpret the proper mathematical model. Through such models, Modeling MEMS and NEMS illuminates microscale and nanoscale phenomena, thereby facilitating the design and optimization of micro- and nanoscale devices. After some introductory material, a review of continuum mechanics, and a study of scaling, the book is organized around phenomena. Each chapter addresses a sequence of real devices that share a common feature. The authors abstract that feature from the devices and present the mathematical tools needed to model it. They construct, analyze, and interpret a series of models of increasing complexity, then at the end of the chapter, they return to one of the devices described, apply the model to it, and interpret the analysis. In the beginning, the world of microdevices was dominated by experimental work and the development of fabrication techniques. As it matures, optimization and innovative designs are moving to the forefront. Modeling MEMS and NEMS not only provides the practical background and tools needed to design and optimize microdevices but it also helps develop the intuitive understanding that can lead to developing new and better designs and devices.

Chemical Sensors 9 and MEMS NEMS 9

Author: G. Hunter
Publisher: The Electrochemical Society
ISBN: 9781566778275
Release Date: 2010-10
Genre: Chemical detectors

This issue of ECS Transactions is a compilation of papers presented at the 218th Meeting of the Electrochemical Society, held in Las Vegas from October 10 - 15, 2010. The papers presented covered the research and development in the field of chemical (gas, ion, bio and other) sensors, including molecular recognition surface, transduction methods, and integrated and micro sensor systems, as well as all aspects of MEMS/NEMS technology, including micro/nanomachining, fabrication processes, packaging, and the application of these structures and processes to the miniaturization of chemical sensors, physical sensors, biosensors, miniature chemical analysis systems and other devices.

From MEMS to Bio MEMS and Bio NEMS

Author: Marc J. Madou
Publisher: CRC Press
ISBN: 9781439895245
Release Date: 2011-06-13
Genre: Technology & Engineering

From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. Fully illustrated in color, the text contains end-of-chapter problems, worked examples, extensive references for further reading, and an extensive glossary of terms. Details the Nanotechnology, Biology, and Manufacturing Techniques Applicable to Bionanotechnology Topics include: Nonlithography manufacturing techniques with lithography-based methods Nature as an engineering guide and contrasts top-down and bottom-up approaches Packaging, assembly, and self-assembly from ICs to DNA and biological cells Selected new MEMS and NEMS processes and materials, metrology techniques, and modeling Scaling laws, actuators, power generation, and the implementation of brains in miniaturizes devices Different strategies for making micromachines smarter The transition out of the laboratory and into the marketplace The third volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, the book discusses top-down and bottom-up manufacturing methods and explains how to use nature as a guide. It provides a better understanding of how to match different manufacturing options with a given application that students can use to identify additional killer MEMS and NEMS applications. Other volumes in the set include: Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology Manufacturing Techniques for Microfabrication and Nanotechnology

Chemical Sensors 7 and MEMS NEMS 7

Author: Peter J. Hesketh
Publisher: The Electrochemical Society
ISBN: 9781566775106
Release Date: 2006-01-01
Genre: Chemical detectors

The latest developments in chemical and biological sensor research and development. Topics include: 1. new selective species recognition surfaces and materials; 2. molecular recognition materials and approaches to minimize non-specific binding; 3. semi-selective species recognition materials; 4. novel methods for signal processing, signal amplification, and detection; 5. detection systems for multiple analytes in complex samples; 6. sensor arrays; and 7. analytical systems and approaches.

Modeling MEMS and NEMS

Author: John A. Pelesko
Publisher: CRC Press
ISBN: 9781420035292
Release Date: 2002-11-25
Genre: Technology & Engineering

Designing small structures necessitates an a priori understanding of various device behaviors. The way to gain such understanding is to construct, analyze, and interpret the proper mathematical model. Through such models, Modeling MEMS and NEMS illuminates microscale and nanoscale phenomena, thereby facilitating the design and optimization of micro- and nanoscale devices. After some introductory material, a review of continuum mechanics, and a study of scaling, the book is organized around phenomena. Each chapter addresses a sequence of real devices that share a common feature. The authors abstract that feature from the devices and present the mathematical tools needed to model it. They construct, analyze, and interpret a series of models of increasing complexity, then at the end of the chapter, they return to one of the devices described, apply the model to it, and interpret the analysis. In the beginning, the world of microdevices was dominated by experimental work and the development of fabrication techniques. As it matures, optimization and innovative designs are moving to the forefront. Modeling MEMS and NEMS not only provides the practical background and tools needed to design and optimize microdevices but it also helps develop the intuitive understanding that can lead to developing new and better designs and devices.

An Integrated Framework to Reduce Time to Market for MEMS NEMS Developments

Author: Benjamin T. Nakashima-Paniagua
Publisher:
ISBN: OCLC:886614655
Release Date: 2014
Genre: Microelectromechanical systems

Innovative products based on micro and nanotechnologies (MNT) have made rapid improvements in terms of functionality, cost and performance. Several developments based on these technologies have already benefited society greatly. However, many applications and devices based on these systems are still in the research phase, struggling to reach the commercial stage. The ultimate goal of our research work is to develop a new methodology that reduces the time to market for MNT based products. The first research methodology used as part of our work is based on prescriptive research to investigate the current state of affairs of the micro and nano electro-mechanical-systems (MEMS/NEMS) industry to identify, synthesize, and tie together different perspectives regarding MEMS/NEMS development. By doing this, it was possible to identify the main bottlenecks in the process and define a more specific objective: To develop a new methodology that allows MEMS/NEMS designers to expedite the design and fabrication stages for devices based on those technologies. The second research methodology used is based on descriptive research to propose an algorithmic methodology to assist some of the main problems for the MEMS/NEMS industry. A modular knowledge based system was conceived, where different managerial and technical tools are used. We developed a standardized language to define manufacturing steps required to fabricate and prototype MEMS devices based on an international standard: ISO 18629. We also developed a hierarchical structure based on object-oriented principles to define new taxonomic levels of abstraction for MEMS processes, providing a generic, but at the same time, comprehensive, and flexible structure. Another important part of our research work was the development of mathematical models to evaluate potential alternatives for MEMS manufacturing process. Many of the manufacturing processes for MEMS are new variants of semiconductor processes or totally new processes. Because of this, there is very little statistical information which can be used to evaluate alternatives. We developed mathematical models using fuzzy inference systems to evaluate potential alternatives in an efficient way, effectively reducing the MEMS/NEMS development time and impacting positively the time to market for these developments.